Failure isolation using FIB assist Photon Emission Microscopy analysis and microprobe analysis

Abstract

OBIRCH/EMMI and microprobe analysis were widely used to isolate failed device. But routine failure isolation method may not find the leakage path on some special functional failure cases. Two cases were presented to show a useful failure isolation strategy—FIB assisted photon emission analysis and microprobe by performing simulation or removing the load effect.