Enhancement of the partial discharge inception voltage of ceramic substrates for power modules by trench coating

U. Waltrich, C. F. Bayer, M. Reger, A. Meyer, X. Tang, A. Schletz
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引用次数: 12

Abstract

Due to the ongoing development of high-blocking semiconductors the installed ceramic circuit boards in power modules, such as DBC (Direct Bond Copper) or AMB (Active Metal Brazed) substrates, will have to isolate high voltages (HV) beyond 6.5 kV in the near future with high lifetime and reliability. Such high blocking voltages and the correlating increased electrical field strengths induce partial discharges (PD) in the ceramic substrate as well in the encapsulating organic materials, which represent a key degradation mechanism of HV power modules. In this work a promising novel coating technology for ceramic substrate trenches, significantly enhancing the partial inception voltage (PDIV) of these substrates, is presented. The coating works as a refractive field control and reduces the field strengths in the most critical section for PD - the so-called triple point - between ceramic, encapsulate and copper metallization. Electric field simulations show a possible reduction of the electric loads in that critical area by over 10 %. Phase resolved partial discharge (PRPD) tests confirm the simulation results by significantly increased partial discharge inception voltages (PDIV) of trench coated Al2O3 DBC substrates (curamik® power) compared to untreated ones. Long term aging tests (1000 h @ 85 °C/85 % r. h.) on trench coated DBCs, covered with Wacker SilGel 612®, were executed to examine the robustness of this coating and to investigate the PD behavior of DBC substrates depending on the degree of aging. The novel coating looks very promising.
用沟槽涂层提高功率模块陶瓷基板局部放电起始电压
由于高阻隔半导体的持续发展,在功率模块中安装的陶瓷电路板,如DBC(直接结合铜)或AMB(活性金属钎焊)衬底,在不久的将来将不得不隔离6.5 kV以上的高压(HV),具有高寿命和可靠性。如此高的阻断电压和相应的电场强度增加会导致陶瓷衬底和封装有机材料中的局部放电(PD),这是高压功率模块的关键降解机制。本文提出了一种新型的陶瓷衬底沟槽涂层技术,可以显著提高衬底的部分起始电压(PDIV)。该涂层起到了折射场控制的作用,并降低了PD最关键部分的场强,即陶瓷、封装和铜金属化之间的所谓三相点。电场模拟表明,该临界区域的电负荷可能减少10%以上。与未处理的衬底相比,沟槽涂层Al2O3 DBC衬底(curamik®功率)的部分放电起始电压(PDIV)显著增加,相分辨局部放电(PRPD)测试证实了模拟结果。在覆盖有瓦克SilGel 612®的沟槽涂层DBC上进行了长期老化测试(1000小时@ 85°C/ 85% r. h),以检查该涂层的坚固性,并根据老化程度研究DBC基板的PD行为。这种新型涂层看起来很有前途。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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