Spectral Gated Imaging of Dynamic Photon Emission in Mixed-Signal and Power Devices

Abstract

In this paper, the spectral analysis capability combined with the gated imaging technique of dynamic photon emission (GI-PEM) is economically realized. It is introduced as a powerful localization tool by combining a low-cost near-infrared InGaAs image intensifier (I.I.) and a transmission blazed grating. At first, the setup and method for spectral gated imaging of photon emission microscope (SGI-PEM) are presented. On one hand, with GI-PEM as one of global localization tools, it shows an unique and economical debugging and pinpointing capabilities to dynamic fails in mixed-signal and power devices, such as current/voltage spikes, power-up, ESD and latch-up problems. On the other hand, with its spectral capability it can also get insight into the evolution of the physical mechanism of dynamic photon emission in a short time. With detailed dynamical spectra study of the stress process in mixed-signal and power MOSFETs, the corresponding design physical parameters can be optimized to improve their performance.