Oxidation of copper leadframe

G. Ang, L. C. Goh, K. W. Heng, Susanta Lahiri
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引用次数: 9

Abstract

Delamination of the oxide film from copper alloy leadframes is considered a serious reliability problem for microelectronics packages. In an effort to identify the factors which may lead to the formation of brittle and/or poorly adhering oxides, kinetics of oxidation of leadframes in air was investigated by measuring the oxide thickness as a function of time at temperatures ranging from 200 to 300/spl deg/C. The oxidation was found to occur fairly rapidly in this temperature range. Analysis of the data indicates a logarithmic growth law in the 100-1400 nm thickness range, and an activation energy which is much smaller than that reported for the oxidation of unalloyed copper by a diffusion mechanism. The results of this investigation is presented here indicating the important role of defects in the oxidation of leadframe.
铜引线架的氧化
铜合金引线框氧化膜的分层被认为是微电子封装的一个严重的可靠性问题。为了确定可能导致脆性和/或粘附性差的氧化物形成的因素,在200至300/spl℃的温度范围内,通过测量氧化物厚度随时间的变化,研究了引线框架在空气中的氧化动力学。发现在这个温度范围内氧化发生得相当快。数据分析表明,在100 ~ 1400 nm厚度范围内呈对数增长规律,且活化能远小于非合金铜的扩散氧化活化能。研究结果表明,缺陷在引线框氧化过程中起着重要作用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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