PZT piezoelectric coefficient extraction by PZT-actuated micro-beam characterization and modeling

Abstract

In this paper, we showed the realization and the characterization of a PZT-actuated micro-cantilever. The measurement and the modeling of its resonant frequency allow deducing the cantilever length. Using this value and combining the measurement and the modeling of the cantilever displacement amplitude at a given voltage, we extract PZT d31 piezoelectric coefficient as being 165±25 pm/V; which is among the highest values ever published for PZT thin films. It is worth noting that d31 is homogenous throughout the whole 200mm wafer.