Assembly-free 3-D microfabrication process using single-mask multidirectional photolithography

Abstract

In this paper, we propose a novel microfabrication technique without assembling process including alignment and bonding for significant 3-D microstructures and microfludic networks. The proposed process can integrate embedded microchannels with free path, orifices, openings and nozzles into a complicated microfluidic network by using the inclined/rotated UV lithography with a characteristic single-mask of whole image exposure in a short period of time.