Novel pixel structure with Stacked Deep Photodiode to achieve high NIR sensitivity and high MTF

Abstract

Novel pixel structure with Stacked Deep Photodiode (SDP) has been newly developed for both high Near Infra-Red (NIR) sensitivity and high Modulation Transfer Function (MTF). SDP with 5.4μm pixel pitch has achieved Quantum Efficiency (QE) of 30% and MTF of 40% at Nyquist frequency at 850nm wavelength by stacking photodiode completely separated from neighboring pixels.