Bondability and reliability of Ag Alloy wire (92 and 95% Ag Alloy) on thin aluminum bonding pad

Jose Palagud, S. -. Wang
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引用次数: 1

Abstract

There are several types of Ag Alloy wires being introduced for discrete IC manufacturing, a low (92%) and high purity level (95%) Ag Alloy wires are the most common one. The IC industries have been shifting to this type of wires due mainly to its lower cost and softer property as compared to gold and copper wire. Copper wire even with the improvements done such as alloying the material with palladium for improved reliability has limitations of usage for very thin top metallizations. At most 60-70% conversions have only been implemented to the usage of copper wire because of this main obstacle for BOAC (Bond Over Active Circuit) and devices with thin top metallization of at least 2um only are difficult to convert to copper wirebonding. Due to its relative hardness, higher parameter settings are required to make IMC (Intermetallic), and thin bonding pad metallization of AlSi or AlCu cannot withstand the compressive effect of this wire. This is specially observed for BSOB (Bond Stitch on Ball) wirebonding, where aside from the ball bonding, a stitch bond is placed on top of this ball bond. The impact coming from this additional bonding is adding severe compressive effect, for copper wires (usually Pd coated copper wire is use for BSOB) require high bond parameter to create an alloy effect or interconnection of hard copper ball and the bonding pad.
银合金线(92和95%银合金)在薄铝焊盘上的可焊性和可靠性
有几种类型的银合金线被引入离散IC制造,低(92%)和高纯度水平(95%)银合金线是最常见的一种。IC行业一直在转向这种类型的电线,主要是因为与黄金和铜线相比,它的成本更低,性能更软。铜线即使有了改进,比如用钯合金材料来提高可靠性,对于非常薄的顶部金属化的使用也有限制。由于BOAC(有源电路上的键合)的主要障碍,最多60-70%的转换只被实现为铜线的使用,并且仅具有至少2um的薄顶部金属化的设备很难转换为铜线键合。由于其相对硬度,制作IMC (Intermetallic)需要较高的参数设置,AlSi或AlCu的薄焊盘金属化无法承受这种线材的压缩作用。这特别适用于BSOB (Bond Stitch on Ball)线键,除了球键合之外,在球键合的顶部还放置了一个针键。由于铜线(BSOB通常使用Pd涂层铜线)需要很高的键合参数,以产生合金效果或硬铜球与键合垫的互连,因此这种额外的键合会增加严重的压缩效应。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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