The study of silicon dies stress in stacked die packages

E. Yamada, K. Abe, Y. Suzuki, M. Amagai
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Abstract

The purpose of the present study is to understand the overhang size effect of stacked die package on a chip. The deflection and stress in the chip as during wire bonding is evaluated using finite element model. It is considered that stresses in the part of top die over the spacer edge, and effect of the thickness on the chip is discussed. Also, this study provides stresses of the structure around a bond pad during bonding process. The stress of a top die is investigated for two types of spacer materials, silicon and resin spacer, respectively.
堆叠晶片封装中硅晶片应力的研究
本研究的目的是了解堆叠晶片封装的悬垂尺寸效应。采用有限元模型对焊接过程中芯片的挠度和应力进行了计算。考虑了上模在垫片边缘处的应力,并讨论了厚度对芯片的影响。此外,本研究还提供了键合过程中键合垫周围结构的应力。研究了硅垫片和树脂垫片两种不同垫片材料的顶模应力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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