Thermocouples fabricated on microfluidic trench sidewall capped with film

Abstract

Thermocouples on the trench sidewall fronting on the flow is fabricated by applying 3D photolithography. Without the flow, the thermocouple on the trench sidewall shows the same temperature with that on the wafer top surface apart from the channel. When the hot gas starts to flow, the thermocouple on the sidewall shows the response increasing its open voltage. The local temperature is measured accurately.