Development of a microphotocantilever for near-field scanning optical microscopy

Abstract

A new type of near-field scanning optical microscopy (NSOM) using a microcantilever with a photo diode on its tip is described. The photo-sensitive cantilever, c alled a microphotocantil ever, was fabricated using micromachining techniques and its use demonstrated. Fine NSOM images below 20 nm are obtained. Atomic force microscopy (AFM) c an be done simultaneously to NSOM using t he microphotocantilever. Well correlated NSOM and AFM images are obtained in the near-field optical mode.