Pd coated Cu wire bond on XoAA material in LQFP package

W. Yong, J. Teo, G. Lee, Tan Kian Heong, A. Swee
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Abstract

Pd coated wire is increasely being used as a substitute for bare Cu wire. Being a noble metal, Pd coated wire has high resistance to oxidation enabling longer shelf life. Its chemical properties also exhibit better second bond-ability on micro PPF lead frame enabling simple bond process translating to high throughput and yield. It has higher stiffness which is able to minimize the wire sweep especially for LQFP, as well as thermo-mechnical robustness. However, there are a few challenges to be overcomed before the bonding process can be released. Basically, Pd will diffuse non-uniformly into FAB after EFO sparking. The formation of Pd-Cu alloys will increase FAB hardness resulting in higher risk of oxide crack issue. Technically, due to its physical properties, Pd coated wire will produce higher bonding impact on the bond pad in order to achieve stable and reliable 1 st bond process. Conversely, this approach is not feasible for XoAA material. A new 1 st bonding process has to be developed that can produce a stable bond yet able to meet all buy off requirements. This paper will show the study of Pd coated wire interaction with pad metallization of NiP/Pd/ Au on XoAA material. In the 1 st bond process technology development, the effect of capillary on pad structure are examined. The traditional capillary design appears to be detrimental to XoAA material. A special capillary design was introduced that incorporated a different bond mechanism with the consideration of wire properties and pad structure. An extensive Design of Experiment (DOE) is carried out to define a robust process window. New analysis method by using optical profiling was also introduced for quick and reliable assessment for pad deformation. Bond interface was also validated. Transmission Electron Microscopy (TEM) with EDX line scan analysis showed the presence of Cu-Pd at the bond interface. This study also established two criterias to control oxide crack issue. This process technology is proven and able to meet automotive requirement. In short, the requirements to achieve stable bondability and reliability has been developed in this study.
LQFP封装中XoAA材料的Pd包覆铜线键合
钯包覆线越来越多地被用作裸铜线的替代品。作为一种贵金属,钯包覆线具有较高的抗氧化性,使保质期更长。它的化学性质在微型PPF引线框架上也表现出更好的二次键合能力,使简单的键合过程转化为高通量和良率。它具有更高的刚度,能够最大限度地减少线材扫描,特别是对于LQFP,以及热机械稳健性。然而,在粘合过程可以释放之前,有一些挑战需要克服。基本上,Pd在EFO火花后会不均匀地扩散到FAB中。钯铜合金的形成会增加FAB的硬度,从而增加氧化裂纹问题的风险。从技术上讲,由于钯包覆线的物理性质,为了实现稳定可靠的一级键合过程,钯包覆线会对键合垫产生更高的键合冲击。相反,这种方法对于XoAA材料是不可行的。必须开发一种新的粘合工艺,既能产生稳定的粘合,又能满足所有的买断要求。本文主要研究了在XoAA材料上进行NiP/Pd/ Au焊金属化对钯包覆线相互作用的影响。在键合工艺技术的发展中,考察了毛细管对焊盘结构的影响。传统的毛细管设计似乎不利于XoAA材料。引入了一种特殊的毛管设计,该设计结合了不同的键合机制,同时考虑了金属丝性能和焊盘结构。通过广泛的实验设计(DOE)来定义一个稳健的过程窗口。介绍了一种快速、可靠地评估垫块变形的光学剖面分析方法。还验证了绑定接口。透射电子显微镜(TEM)和EDX线扫描分析表明,Cu-Pd存在于键界面。本研究还建立了控制氧化裂纹问题的两个标准。该工艺技术经过验证,能够满足汽车行业的要求。总之,本研究提出了实现稳定粘接性和可靠性的要求。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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