Tuning of nonlinearities and quality factor in a mode-matched gyroscope

Abstract

This paper examines methods to electrically tune quality factor (Q) and cubic softening nonlinearity of a mode-matched MEMS gyroscope. The gyroscope includes traditional drive-sense combs and dedicated shaped combs for cubic nonlinearity and frequency tuning. In addition to nonlinearity, Q can be tuned by understanding the nature of the losses. Interconnect resistances are added to the electromechanical resonator model to capture the electrical losses that depend on the applied DC proof mass potential.