3D coupled electro-mechanics for MEMS: applications of CoSolve-EM

Abstract

Micro-electro-mechanical systems (MEMS) are often designed on scales at which electrostatic forces are capable of moving or deforming the parts of the system. In this regime accurate prediction of device behavior may require 3D coupled simulations between the electrostatic and mechanical domains. We have recently developed CoSolve-EM, a coupled solver for 3D quasi-static electro-mechanics. In this paper, we demonstrate the application of CoSolve-EM to five classes of electro-mechanical problems that are often intractable to other techniques. These classes are: devices with electrostatic pull-in instabilities, devices in which precise deformations are required, devices driven by multiple conductors, capacitive sensors that make use of surface contact, and actuators that make use of surface contact.