Resonant-tunneling-diodeterahertz oscillator integrated with slot-coupled patch antenna

Abstract

We proposed and fabricated resonant-tunneling-diode (RTD) terahertz oscillators integrated with slot-coupled patch antennas for extraction of output power without the use of Si lenses. By eliminating a usually used bulky Si lens, we obtained a compact room-temperature terahertz oscillator. A 170-μm square patch antenna was fabricated on a 7-μm-thick BCB layer stacked on an RTD with a slot resonator. The RTD oscillated at 500 GHz, and the output power of ~40 μW was radiated in the upward direction at the resonance of patch antenna coupled to the RTD and slot resonator. The measured radiation pattern reasonably agreed with theoretical analysis.