{"title":"Flange correction to four-terminal contact resistance measurements","authors":"U. Lieneweg, D. Hannaman","doi":"10.1109/ICMTS.1990.67875","DOIUrl":null,"url":null,"abstract":"A heuristic model for flange correction to four-terminal measurements of the interfacial resistance in square contacts between a semiconducting and a metal layer, or between metal layers is presented. The model reproduces results from experiments with geometric variations when a constant interfacial resistivity is fitted, and compares well to simulations.<<ETX>>","PeriodicalId":196449,"journal":{"name":"International Conference on Microelectronic Test Structures","volume":"19 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1990-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Microelectronic Test Structures","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.1990.67875","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
A heuristic model for flange correction to four-terminal measurements of the interfacial resistance in square contacts between a semiconducting and a metal layer, or between metal layers is presented. The model reproduces results from experiments with geometric variations when a constant interfacial resistivity is fitted, and compares well to simulations.<>