Low temperature bonding using microscale Cu particles coated with thin Sn layers at 200 °C

Xiangdong Liu, Siliang He, H. Nishikawa
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引用次数: 2

Abstract

Sn-Cu intermetallic compounds (IMCs) consisted joints were achieved by a low temperature solid-state bonding using microscale Cu particles coated with thin Sn layers for high temperature die attach application. The bonding process was conducted at 200 °C for 30 min under an applied pressure of 10 MPa using a thermo-compression bonding system. The formic acid atmosphere was used for reducing the oxide layer on the Sn coating and the Cu substrate during the bonding process. After bonding, the joint showed a microstructure fully comprising Cu-Sn intermetallic compounds matrix with a dispersion of pure Cu particles, and a shear strength equivalent to that of conventional Pb-5Sn solder could be achieved. The results demonstrate that low temperature solid-state bonding using microscale Cu particles coated with thin Sn layers has the potential to fulfill the requirement of die attach application.
在200°C下,用微尺度的铜颗粒包覆薄锡层进行低温键合
采用低温固相结合的方法,在微尺度的Cu颗粒表面涂覆薄的Sn层,制备出了Sn-Cu金属间化合物(IMCs)。采用热压缩键合系统,在200°C下,在10 MPa的压力下进行30 min的键合过程。在焊接过程中,采用甲酸气氛还原锡涂层和Cu基体上的氧化层。结合后,钎料的微观结构完全由Cu- sn金属间化合物基体组成,并以纯Cu颗粒分散,抗剪强度与常规Pb-5Sn钎料相当。结果表明,采用微尺度Cu颗粒包覆薄Sn层的低温固相键合技术具有满足模具贴附应用要求的潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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