Design and Fabrication of Graded Copper Inverse Opals (g-CIOs) for Capillary-Fed Boiling in High Heat Flux Cooling Applications

Qianyi Wu, Chi Zhang, M. Asheghi, K. Goodson
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Abstract

Capillary-fed boiling in microporous copper inverse opals (CIOs) is capable of removing an excess of 1 kW/cm2 at 10–15 °C superheat over small wicking distances ∼ 200 μm. In order to remove heat from large area chips (> 1 cm2), longer capillary wicking distance is desired to reduce the manufacturing complexity of the 3D manifold for liquid delivery and vapor extraction. In this study, we propose graded copper inverse opals (g-CIOs) where smaller pores at the bottom provide high capillary pressure for liquid delivery, while larger pores at the top reduce viscous pressure drop for vapor extraction. This nonhomogeneous wicking material decouples the permeability and capillary pressure in the vertical and lateral directions, resulting in greater CHFs and capillary wicking distances. In this study, we demonstrate the feasibility of fabricating g-CIOs material with up to three different pore diameters (2 μm, 5 μm, and 10 μm) using a multi-step template sintering and copper electrodeposition process. We then leverage and expand upon a well-calibrated experimental model for the prediction of CHF in monoporous CIOs to map the performance metrics for g-CIOs. The model combines a hydraulic resistance network with Darcy’s law and accounts for the nonhomogeneous permeabilities in lateral and vertical directions. Using this model, we study the impact of total wick thickness and graded pore-size combinations on the critical heat fluxes and wicking distances. Our modeling results conclude that a two-layer g-CIOs can potentially reach ∼70% enhancement in the critical heat flux or ∼30% enhancement in the wicking length compared to monoporous CIOs of the same thickness. Our fabrication capability and preliminary modeling results offer the opportunity to design boiling tests with optimized g-CIOs and exploring the potential of dissipating high heat flux for large area cooling applications.
高热流密度毛细管沸腾用梯度铜反蛋白石的设计与制备
微孔铜反蛋白石(cio)的毛细管沸腾能够在10-15°C的过高温下,在小的抽吸距离(200 μm)内去除多余的1 kW/cm2。为了从大面积芯片(> 1 cm2)中去除热量,需要更长的毛细管抽芯距离,以减少液体输送和蒸汽提取的3D歧管的制造复杂性。在这项研究中,我们提出了梯度铜反蛋白石(g- cio),其中底部较小的孔隙为液体输送提供了较高的毛细压力,而顶部较大的孔隙则减少了蒸汽提取的粘性压降。这种不均匀的吸干材料在垂直和横向上解耦了渗透率和毛管压力,导致更大的CHFs和毛管吸干距离。在这项研究中,我们证明了使用多步模板烧结和铜电沉积工艺制备三种不同孔径(2 μm, 5 μm和10 μm)的g- cio材料的可行性。然后,我们利用并扩展了一个校准良好的实验模型,用于预测垄断cio的CHF,以映射g- cio的性能指标。该模型将水力阻力网络与达西定律相结合,考虑了横向和纵向的非均质渗透率。利用该模型,我们研究了总芯厚和梯度孔径组合对临界热通量和芯距的影响。我们的建模结果表明,与相同厚度的单孔cio相比,两层g- cio的临界热通量可能增加~ 70%,排芯长度可能增加~ 30%。我们的制造能力和初步的建模结果为设计具有优化的g- cio的沸腾测试提供了机会,并探索了在大面积冷却应用中消散高热流密度的潜力。
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