Rad-Pro: effective software for modeling radiative properties in rapid thermal processing

Abstract

To achieve accurate temperature measurements in rapid thermal processing (RTP), it is critical to determine the radiative properties of silicon wafers with thin-film coatings such as silicon dioxide, silicon nitride, and polysilicon. We have developed a reliable and easily accessible software tool, named Rad-Pro (for radiative properties) using Excel-VBA for prediction of the directional, spectral, and temperature dependence of the radiative properties for multilayer structures consisting of silicon including doping effects and related materials, such as silicon dioxide, silicon nitride, and polysilicon. Users can also input the optical constants of the materials. Rad-Pro also allows the selection of either coherent or incoherent calculation scheme, as well as the polarization states