Nano Evaluation in Electronics Packaging

M. Oppermann, H. Heuer, N. Meyendorf, K. Wolter
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引用次数: 2

Abstract

The challenge of nano packaging requires new non-destructive evaluation (NDE) techniques to detect and characterize very small defects like transportation phenomenon, Kirkendall voids or micro cracks. Imaging technologies with resolutions in the submicron range are the desire. Possible evaluation methods are for example x-ray microscopy, x-ray tomography, ultrasonic microscopy and thermal microscopy. However, techniques with this resolution can not be found on the market. The ldquocenter for non-destructive nano evaluation of electronic packagingrdquo (nanoevareg) is taken up to develop this equipment in cooperation with the electronics industry and to transfer the knowledge to colleagues in industries and research institutions. The new center is a common organization of Fraunhofer IZFP-D and the electronics packaging lab with its centre of microtechnical manufacturing (ZmuP) of the Technische Universitat Dresden.
电子封装中的纳米评价
纳米封装的挑战需要新的无损评估(NDE)技术来检测和表征非常小的缺陷,如运输现象、Kirkendall空洞或微裂纹。分辨率在亚微米范围内的成像技术是人们所渴望的。可能的评价方法有x射线显微镜、x射线断层扫描、超声波显微镜和热显微镜。然而,这种分辨率的技术在市场上找不到。电子封装的无损纳米评估中心(nanoevareg)被用来与电子工业合作开发这种设备,并将知识传授给工业和研究机构的同事。新中心是Fraunhofer IZFP-D和电子封装实验室及其德累斯顿工业大学微技术制造中心(ZmuP)的共同组织。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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