CMOS MEMS Lorentz Force Dual-axis Scanning-Stage

Abstract

This study presents a novel dual-axis CMOS MEMS scanning stage driven using the Lorentz force. The device has been successfully implemented using the TSMC 2P4M process. The current routing achieved by three metal layers enables the independent driving for each axis. The measurement results show that the device has resonant frequencies of 1.36KHz and 2.26KHz respectively for each axis.