Modelling, Simulations and Performance Analysis of MEMS vibrating Gyroscope in Coventor MEMS+ Environment

Abstract

In the paper authors present heterogeneous environment for modeling and simulations created with use Coventor MEMS+ and Matlab/SIMULINK software. The big advantage of this solution is possibility to merge with Cadence software what gives in effect big solution for modeling, simulation and design MEMS structure with ROIC (Read Out Integrated Circuit) for further fabrication. Authors present capabilities of implementation and some results obtained from simulations performed in this environment. There were performed for simple model of MEMS vibratory gyroscope with specific box beam springs on those inertial mass is suspended.