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IGZO front-gated TFTs for 3D DRAMs: Process and device advancement

Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials Pub Date : 2021-09-08 DOI:10.7567/ssdm.2021.j-6-03
N. Rassoul, S. Subhechha, Kaustuv Banerjee, A. Belmonte, Gabriele Donadio, H. Puliyalil, Murat Pak, Ming Mao, Lieve Teugels, Diana Tsvetanova, Shreya Kundu, Nina Bazzazian, Harold Dekkers, Michiel J. van Setten, A. Chasin, Jef Geypen, J. Heijlen, Davide Crotti, L. D. Piazza, L. Goux, R. Delhougne, G. Kar
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用于3D dram的IGZO前置门控TFTs:工艺和器件进展
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials
Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials
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