Experimental characterization of process corners effect on SRAM alpha and neutron Soft Error Rates

Abstract

This paper shows alpha and neutron experimental Soft Error Rate characterization of a SRAM test vehicle processed with different process corners in order to emulate the variability encountered in volume production. It allows assessing large variability effects with few samples that are compatible with accelerated SER testing. This allows investigating the effect of variability in mass-production on soft error rate of deca-nanometric technologies.