Understanding of traps causing random telegraph noise based on experimentally extracted time constants and amplitude

Abstract

We develop a high-speed method to extract time constants and noise amplitude of random telegraph noise (RTN). We investigate distributions of these RTN parameters for more than 270 n- and p-MOSFETs and clarify spectroscopy of traps causing RTN. Most of traps are distributed in an energy range of 220 meV, and mean times to capture/emission are measured in a wide range between 10 µs and 20 ms.