Investigations on the oxide removal mechanism during ultrasonic wedge-wedge bonding process

Y. Long, F. Dencker, F. Schneider, B. Emde, Chun Li, J. Hermsdorf, M. Wurz, J. Twiefel
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引用次数: 11

Abstract

As an inevitable step during ultrasonic bonding of aluminum or copper materials, the removal of oxides that prevent the bond formation is essential for obtaining high quality. Nevertheless, the oxides removal process is still unclear after tens of years' application of ultrasonic bonding. In this project, the removal mechanism was investigated via the analysis of an artificially coated oxide layer. The oxide removal process was observed in real-time by a high-speed observation system and the oxides distribution after the bonding process was observed under an electron microscope. The results show that during the bonding process, the detached oxides first agglomerate into larger particles and were then pressed outside of the contact area. The areas of the particles were counted and fit to a lognormal distribution.
超声楔-楔键合过程中氧化物去除机理的研究
作为铝或铜材料超声键合的一个不可避免的步骤,去除阻碍键合形成的氧化物是获得高质量的必要条件。然而,经过几十年的超声粘接应用,氧化物的去除过程仍不清楚。在本项目中,通过分析人工涂覆的氧化层来研究去除机理。通过高速观察系统实时观察氧化过程,并通过电镜观察键合过程后氧化物的分布。结果表明:在键合过程中,分离的氧化物首先聚集成较大的颗粒,然后被压在接触区域外;对颗粒的面积进行计数,并拟合为对数正态分布。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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