Thermal modeling of micro-hotplates for integrated sensor applications

Darwin T. W Wong, P. Chan, L. Sheng, J. Sin
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引用次数: 4

Abstract

Micromachined micro-hotplate (MHP) is used in integrated gas sensors to heat SnO/sub 2/ sensing film to the high operating temperature with milli-watts of power. This paper reports a detailed thermal modeling study of the MHP using 3-D finite element analysis. Three MHP structures were analyzed. Their thermal characteristics were compared.
用于集成传感器应用的微热板热建模
微机械微热板(MHP)用于集成气体传感器,以毫瓦功率将SnO/sub - 2/传感膜加热到高工作温度。本文采用三维有限元分析方法对MHP进行了详细的热模拟研究。分析了三种MHP结构。比较了它们的热特性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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