Miniaturized SnO/sub 2/-based suitable for temperature-tailored lambda-ratio sensors

ICM 2001 Proceedings. The 13th International Conference on Microelectronics. Pub Date : 1900-01-01 DOI:10.1109/ICM.2001.997494

W. Mozafari, A. Khodadadi, S. Mohajerzadeh, M. Valinasab

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Abstract

A sol-gel method for the fabrication of miniaturized SnO/sub 2/ sensors, compatible with Si technology, is described. The fabrication procedure consists of deposition and patterning of Pt heating elements and sensor contact pads. The SnO/sub 2/ sensing element is formed through a new sol-gel method exploiting a lift-off step for patterning. Sintering of the sensor at a temperature of 600/spl deg/C finalizes the fabrication. Preliminary results of sensor characteristics are reported. In addition, the behaviour of SnO/sub 2/ sensors fabricated using a pressed-pallet method with anomalous characteristics is addressed. The temperature-dependent response of SnO/sub 2/-based sensors as a /spl lambda/-ratio sensing device is reported. A low-high transition in the sensor conductivity, occurring at a ratio of combustible to oxygen gases away from the stoichiometric value, is reported for the first time. The ratio at which this transition arises, happens at values higher than the stoichiometric point for CO and by raising the temperature, it moves towards the stoichiometric point. This phenomenon is reversed for C/sub 2/H/sub 6/.

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小型化SnO/ sub2 /基，适用于温度定制的lambda-ratio传感器

介绍了一种溶胶-凝胶法制备小型化SnO/sub - 2/传感器的方法。制造过程包括铂加热元件和传感器接触垫的沉积和图案化。SnO/ sub2 /传感元件是通过一种新的溶胶-凝胶方法形成的，该方法利用了一个上升步骤进行图像化。传感器在600/spl℃的温度下烧结完成制造。报道了传感器特性的初步结果。此外，还讨论了使用具有异常特征的压板方法制造的SnO/sub /传感器的行为。报道了基于SnO/sub /的传感器作为/spl lambda/-比率传感器件的温度依赖性响应。首次报道了传感器电导率的低-高转变，发生在可燃气体与氧气的比例远离化学计量值时。这种转变发生的比率，发生在高于CO的化学计量点的值上，通过提高温度，它向化学计量点移动。C/sub 2/H/sub 6/则相反。

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ICM 2001 Proceedings. The 13th International Conference on Microelectronics.

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