Magnetostatic wave transducers on silicon wafers and on silicon membranes

Abstract

The paper presents the design, realisation and experiments of MSW launchers and detectors made on silicon wafers and silicon membranes. S parameters measurement on ferrite unloaded and on magnetised ferrite loaded structures demonstrates the feasibility of such transducer. Using the silicon membranes to support these devices offers the advantage of miniaturisation, with important openings toward microwave circuit integration on semiconductor substrate.