{"title":"Comparison of cut-back method and optical backscatter reflectometry for wafer level waveguide characterization","authors":"A. Peczek, C. Mai, G. Winzer, L. Zimmermann","doi":"10.1109/ICMTS48187.2020.9107905","DOIUrl":null,"url":null,"abstract":"The optimum optical characterization method suitable for wafer level waveguide testing is an important issue for silicon photonic methodology. In this paper we focus on comparing the two most widespread measurement techniques: cut-back and optical backscatter reflectometry.","PeriodicalId":327379,"journal":{"name":"2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS)","volume":"7 1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS48187.2020.9107905","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
The optimum optical characterization method suitable for wafer level waveguide testing is an important issue for silicon photonic methodology. In this paper we focus on comparing the two most widespread measurement techniques: cut-back and optical backscatter reflectometry.