M. Toledano-Luque, B. Kaczer, P. Roussel, T. Grasser, G. Wirth, J. Franco, C. Vrancken, N. Horiguchi, G. Groeseneken
{"title":"Response of a single trap to AC negative Bias Temperature stress","authors":"M. Toledano-Luque, B. Kaczer, P. Roussel, T. Grasser, G. Wirth, J. Franco, C. Vrancken, N. Horiguchi, G. Groeseneken","doi":"10.1109/IRPS.2011.5784501","DOIUrl":null,"url":null,"abstract":"We study the properties of a single gate oxide trap subjected to AC Bias Temperature Instability (BTI) stress conditions by means of Time Dependent Defect Spectroscopy. A theory for predicting the occupancy of a single trap after AC stress is developed based on first order kinetics and verified on experimental data. The developed theory can be used to develop circuit simulators and predict time dependent variability.","PeriodicalId":242672,"journal":{"name":"2011 International Reliability Physics Symposium","volume":"204 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"69","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 International Reliability Physics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS.2011.5784501","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 69
Abstract
We study the properties of a single gate oxide trap subjected to AC Bias Temperature Instability (BTI) stress conditions by means of Time Dependent Defect Spectroscopy. A theory for predicting the occupancy of a single trap after AC stress is developed based on first order kinetics and verified on experimental data. The developed theory can be used to develop circuit simulators and predict time dependent variability.