Re-Evaluation of Proposed Microfabrication Process Cost Calculator

Abstract

We provide a cost calculation of running a pair of example nanofabrication processes in the Stanford Nanofabrication Facility and the University of California, Berkeley's Marvell Nanofabrication Laboratory. Cost analysis for a MEMS membrane process and a photonic waveguide process for each facility will be shown at the symposium. In this abstract the outline for the MEMS membrane process at SNF is provided as an example.