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Technology Challenge and Opportunity of HfO2-based FeFET Memory

Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials Pub Date : 2021-09-08 DOI:10.7567/ssdm.2021.b-6-01
M. Kobayashi, Fei Mo, Jiawen Xiang, Jixuan Wu, T. Saraya, T. Hiramoto
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基于hfo2的ffet存储器的技术挑战与机遇
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Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials
Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials
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