In-situ moire measurement of adhesive flip-chip bonded assembly under thermal cycling condition

S. Ham, W. Kwon, K. Paik, Soon-Bok Lee
{"title":"In-situ moire measurement of adhesive flip-chip bonded assembly under thermal cycling condition","authors":"S. Ham, W. Kwon, K. Paik, Soon-Bok Lee","doi":"10.1109/POLYTR.2002.1020184","DOIUrl":null,"url":null,"abstract":"The use of flip-chip technology has many advantages over other approaches for high-density electronic packaging. Adhesive flip-chip bonding using ACFs (anisotropic conductive films) or ACPs (anisotropic conductive pastes) is one of the major flip-chip technologies, which has short chip-to-substrate interconnection length, high productivity, and miniaturization of package. Therefore, many researchers and makers are interested in this adhesive flip-chip bonding scheme. In addition, the understanding of thermal deformation has been recognized as the key for a reliable design of adhesive flip-chip bonding assembly. In this study, thermal deformations of adhesive bonded flip-chip-on-board package during thermal cycling were investigated using in-situ high sensitivity moire interferometry. For temperature cycling, a small-sized thermal chamber having an optical window was used with Portable Engineering Moire Interferometer. The warpage of the silicon chip were measured during two thermal cycles between 25/spl deg/C and 125/spl deg/C. When the temperature of the assembly was increased to higher than the glass transition temperature (T/sub g/), the warpage of the chip is fully diminished and the warpage was characterized by the T/sub g/ regardless of previous temperature history. From the test results, it was shown that the in-situ moire interferometry scheme is effective and powerful tool to characterize the thermal deformation of microelectronics assembly using adhesive.","PeriodicalId":166602,"journal":{"name":"2nd International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics. POLYTRONIC 2002. Conference Proceedings (Cat. No.02EX599)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"8","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2nd International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics. POLYTRONIC 2002. Conference Proceedings (Cat. No.02EX599)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/POLYTR.2002.1020184","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 8

Abstract

The use of flip-chip technology has many advantages over other approaches for high-density electronic packaging. Adhesive flip-chip bonding using ACFs (anisotropic conductive films) or ACPs (anisotropic conductive pastes) is one of the major flip-chip technologies, which has short chip-to-substrate interconnection length, high productivity, and miniaturization of package. Therefore, many researchers and makers are interested in this adhesive flip-chip bonding scheme. In addition, the understanding of thermal deformation has been recognized as the key for a reliable design of adhesive flip-chip bonding assembly. In this study, thermal deformations of adhesive bonded flip-chip-on-board package during thermal cycling were investigated using in-situ high sensitivity moire interferometry. For temperature cycling, a small-sized thermal chamber having an optical window was used with Portable Engineering Moire Interferometer. The warpage of the silicon chip were measured during two thermal cycles between 25/spl deg/C and 125/spl deg/C. When the temperature of the assembly was increased to higher than the glass transition temperature (T/sub g/), the warpage of the chip is fully diminished and the warpage was characterized by the T/sub g/ regardless of previous temperature history. From the test results, it was shown that the in-situ moire interferometry scheme is effective and powerful tool to characterize the thermal deformation of microelectronics assembly using adhesive.
热循环条件下胶粘剂倒装片粘接组件的原位云纹测量
使用倒装芯片技术比其他高密度电子封装方法有许多优点。采用各向异性导电膜(ACFs)或各向异性导电糊(ACPs)的胶粘式倒装芯片键合技术是主要的倒装芯片技术之一,具有芯片-衬底互连长度短、生产率高、封装小型化等优点。因此,许多研究人员和制造商对这种粘合剂倒装芯片连接方案感兴趣。此外,热变形的理解已被认为是可靠设计粘接倒装片键合组件的关键。本研究采用原位高灵敏度云纹干涉测量法,研究了热循环过程中胶结倒装芯片的热变形。为了实现温度循环,使用了一个带有光学窗的小型热室和便携式工程云纹干涉仪。在25/spl℃和125/spl℃之间的两个热循环中测量了硅片的翘曲量。当组件温度升高到高于玻璃化转变温度(T/sub g/)时,芯片的翘曲完全减小,并且无论之前的温度历史如何,翘曲都用T/sub g/来表征。实验结果表明,原位云纹干涉测量法是表征微电子组件粘接热变形的有效而有力的工具。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信