NBTI in dual gate oxide PMOSFETs

P. Chaparala, D. Brisbin, J. Shibley
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引用次数: 13

Abstract

In advanced analog and mixed signal applications, Negative Bias Temperature Instability (NBTI) in dual gate oxide (DGO) technologies poses significant challenges for process development and robust analog circuit design. In this paper, Vt mismatch shift due to NBTI in a cascode current mirror is examined. The impact of stress time, temperature, gate voltage, drain voltage, and annealing on NBTI degradation is investigated over a wide range of stress conditions. Proper process trade-offs must be made to reduce NBTI degradation while integrating a DGO module into a high performance CMOS core process.
双栅氧化pmosfet中的NBTI
在先进的模拟和混合信号应用中,双栅氧化物(DGO)技术中的负偏置温度不稳定性(NBTI)对工艺开发和稳健的模拟电路设计提出了重大挑战。本文研究了级联码电流镜中由于NBTI引起的Vt失配移位。在各种应力条件下,研究了应力时间、温度、栅极电压、漏极电压和退火对NBTI降解的影响。在将DGO模块集成到高性能CMOS核心工艺中时,必须进行适当的工艺权衡,以减少NBTI的退化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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