An Integrated Model for Electromagnetic Field and Heat Transfer in a Cylindrical Silicon Tube Growth System

A. Roy, Q.-S. Chen, H. Zhang, V. Prasad
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引用次数: 0

Abstract

Edge-defined Film-fed Growth (EFG) processes are widely used to grow silicon sheets and hollow cylinders of different shapes, e.g., octagon, nonagon and circular. Growth of large diameter silicon tube can bring further advancements in the photovoltaic technology. In the present investigation, a two dimensional axisymmetric numerical model has been developed for a cylindrical silicon tube growth system. The growth furnace is inductively heated. Magnetic vector potential equation and energy equation are solved to obtain the induced magnetic field and temperature distribution in the system. Selected results for magnetic and thermal fields have been presented for a range of parameters. The effect of using graphite afterheater in the system has also been investigated. The goal of the investigation is the system optimization with respect to the temperature field in the global system and the thermal profile in the grown tube.
圆柱形硅管生长系统中电磁场与传热的集成模型
边缘定义薄膜供给生长(EFG)工艺被广泛用于生长不同形状的硅片和空心圆柱体,例如八角形、非四角形和圆形。大直径硅管的生长可以带来光伏技术的进一步发展。本文建立了圆柱形硅管生长系统的二维轴对称数值模型。生长炉是感应加热的。通过求解磁矢量位方程和能量方程,得到了系统内的感应磁场和温度分布。给出了一系列参数下磁场和热场的选择结果。研究了在系统中使用石墨后加热器的效果。研究的目标是系统的优化相对于全系统的温度场和热分布在生长管。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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