Integrated molecule recognition sensor electronics using nanostructured metal oxides on silicon

Abstract

Electrical sensing of volatile molecular species in environments and/or from our bodies by using mobile electronics is an important issue for future electronic devices. This is because these sensor electronics will have an impact on our daily life and healthcare via collecting and analyzing data. Among various sensor materials, "Metal Oxides" is one of the most abundant and robust materials in ambient atmosphere. However, metal oxide sensors have several essential difficulties when applying to CMOS sensor electronics. Here I show our recent progress as to integrated molecule recognition sensors by utilizing nano-metal oxides [1-3] on silicon.