ESD RF protections in advanced CMOS technologies and its parasitic capacitance evaluation

Abstract

Electrostatic Discharge (ESD) protection for advanced CMOS technologies is a challenge due to down-scaling which introduces a reduction of the intrinsic robustness. Moreover, another challenge is the RF ESD protection in analogue IO pad. Thus, when you merge both topics the challenges are major. This paper shows a methodology, tools and silicon measurements of ESD RF parasitic capacitance in C65nm & C45nm to reach 10Ghz & 20Ghz bandwidth for 1kV & 2kV HBM.