Gas sensors with laser-deposited active layers

Abstract

This article is concerned with comparison of the properties of acetonate and oxidic layer prepared using the impulse laser ablation method, and subsequent deposition LAD. Optimal technical conditions were found for preparation of layers suitable for use as chemical sensors. The properties of the deposition layers were studied on the basis of their FTIR spectra and by measuring their electrical conductivity. Changes in the electrical conductivity were evaluated in connection with detection of a reducing atmosphere. The attaining of sensitivity of about 350 for 1000 ppm H/sub 2/ was amongst the best results obtained.