Integration of metasurfaces onto micro electro mechanical systems for active control of visible and IR light (Conference Presentation)

D. López
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Abstract

The design and implementation of flat optical photonic devices have come to the forefront of ongoing scientific research and technology development. These novel photonic devices use sub-wavelength metal or dielectric resonators spaced on a specific two-dimensional pattern that mimic the phase profile of conventional bulk optical elements. However, most of these structures, known as “metasurfaces”, have so far been passive with its optical performance determined only by the spatial configuration of the metasurface constitutive elements. The development of dynamic metasurfaces is currently a growing area of research directed to obtain real-time tunable operation of metasurfaces and new physical phenomena not feasible with static metasurfaces. In this presentation, I will describe the fundamentals and advantages of incorporating metallic and dielectric metasurfaces onto MEMS devices. The MEMS platform enables electrostatic control of curvature, tilt angle and deformation of metasurfaces, enabling flat and agile optical elements with msec reconfiguration time. Faster reconfigurable metasurfaces can be achieved using MEMS based spatial light modulators in which individual pixels are patterned with nanostructures having different optical response, e.g. we could pre program fixed phase shifts onto each pixel, so the device works as a curved mirror with aberration correction on top. By actuating specific sub-set of pixels, the far-field response of the adaptive metasurfaces can be manipulated. These unique dynamic metasurfaces may provide new opportunities for information optics and imaging by performing complex signal processing directly in the optical domain.
将超表面集成到微机电系统中,用于可见光和红外光的主动控制(会议报告)
平面光学光子器件的设计和实现已经成为当前科学研究和技术发展的前沿。这些新型光子器件使用亚波长金属或介电谐振器,这些谐振器间隔在一个特定的二维模式上,模仿传统块状光学元件的相位轮廓。然而,迄今为止,这些被称为“超表面”的结构中的大多数都是被动的,其光学性能仅由超表面本构元的空间构型决定。动态元表面的发展是目前一个日益增长的研究领域,旨在获得实时可调的元表面操作和静态元表面无法实现的新物理现象。在本次演讲中,我将介绍将金属和介电超表面结合到MEMS器件上的基本原理和优点。MEMS平台可以静电控制超表面的曲率、倾斜角和变形,使光学元件具有微米级重构时间的平面和敏捷性。使用基于MEMS的空间光调制器可以实现更快的可重构超表面,其中单个像素与具有不同光学响应的纳米结构相结合,例如,我们可以在每个像素上预编程固定相移,因此该器件可以作为顶部带有像差校正的曲面镜。通过驱动特定的像素子集,可以控制自适应超表面的远场响应。这些独特的动态超表面可以直接在光学领域进行复杂的信号处理,为信息光学和成像提供新的机会。
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