Extraction of noise parameters for the macromodelling of MEMS

Abstract

We investigate mechanical noise sources of micromechanical systems. The description of noise in the framework of a correlation function formulation is presented and the influence of different operating conditions on the description of a micromachined cantilever as an example is explained. It turns out that the most interesting operation regime will be found where several different timescales occur due so the reduction of a single dominant dissipation channel which in this case is formed by the molecular motion of the gas as an environmental the cantilever. We expect this transition regime to be governed by several diffraction time-scales of comparable magnitude due to the interaction of the learning degree of freedom.