Metamaterials and MEMS (MetaMEMS): a promising trend in Microsystems technology

Abstract

Mechanical metamaterials have been the subject of intense research in recent years. Thanks to a careful design of their geometry, they can be used to master wave propagation, e.g. to guide their propagation in space, to focus the energy in target portion of the space and to create total protection against suitable frequency ranges. The use of metamaterials concepts and properties for innovative MEMS is discussed in this short review paper starting from recent works of the Authors. Properties of vibration isolation at the micro-scale and of signals control by means of micro-oscillators arrays are proposed as meaningful examples of so-called MetaMEMS.