DC-Coupled Laser Induced Detection System for Fault Localization in Microelectronic Failure Analysis

Abstract

This paper describes a new dc-coupled laser induced detection system for fault localization in microelectronic failure analysis. This method removes artifacts inherent in ac-coupled detection systems and is capable of producing an accurate mapping of the laser induced resistance change of the devices without signal attenuation. This method is also capable of localizing large area faults without signal distortion