Torque measurement method using air turbine for micro devices

H. Ota, L. Li, M. Takeda, H. Narumiya, T. Ohara, K. Namura
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引用次数: 1

Abstract

The authors have developed a general-purpose system that can measure very low torques in the order of 10/sup -7/ Nm. The new method proposed here uses wind pressure to apply a load to a turbine attached to the output shaft of the device. It can therefore be used for all rotating micro-devices. The use of wind pressure reduces the loss during measurement, and makes it possible to measure low levels of torque easily by simply attaching the turbine to the device. In the present study, the measuring principle of the new system was verified. In addition, a prototype micromotor 1.6 mm in diameter was fabricated and used to demonstrate that the new system was able to measure torques in the order of 10/sup -7/ Nm while the motor was in operation.
微器件用空气涡轮扭矩测量方法
作者开发了一种通用系统,可以测量10/sup -7/ Nm量级的非常低的扭矩。这里提出的新方法是利用风压对连接在设备输出轴上的涡轮机施加负载。因此,它可以用于所有旋转的微型设备。使用风压减少了测量过程中的损失,并且可以通过简单地将涡轮机连接到设备上轻松地测量低水平的扭矩。在本研究中,验证了新系统的测量原理。此外,还制作了一个直径1.6 mm的微型电机原型,并用于证明新系统能够在电机运行时测量10/sup -7/ Nm量级的扭矩。
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