DdProber: Self-sensing AFM type Nano-prober

Abstract

Nano-prober has the increasing importance for advanced semiconductor device process. Conventional SEM type Nano-prober face the problems, device degradation with electron bombardment and resolution limit. The AFM Nano-prober can work in air, so it is so easy to use for its operation. We report the new type AFM Nano-prober that applied the self-sensing type AFM. This method has the simple structure and easy to use. In the case of Nano-prober that constructed with multiple AFM, this simple method is best choice in this purpose.