Packaging technology of polymer/Si arrayed waveguide grating and their environmental stability

Abstract

In this paper we present the fabrication process and the measuring result of a 32 channel fluorinated FPEEK AWG multiplexer at the central wavelength of 1550 nm. For our AWG, the insertion loss is 12.8-17.8 dB and the crosstalk less than -20 dB. We fabricated the AWG multiplexer by spin coating, photolithographic patterning and reactive ion etching (RIE). The roughness of polymer waveguide endface was reduced by polishing. The polymer AWG's package technology and environmental stability were also discussed.