Strength Reliability for Surfaces micro-machined Polycrystalline silicon Micro-Cantilevers

Abstract

MEMS components failure often happens where environment effects, such as shock, vibration, and temperature cycles. In this paper, the reliability of surfaces micro-machined polycrystalline silicon micro-cantilevers under shock loads was discussed. Using interference theory of stress and strength in the mechanical field, the reliability model was presented and it can predict the probability of the reliability of the cantilever under shock loads. It will help improve the design of MEMS