An on-line data collection and analysis system for VLSI devices at wafer probe and final test

Abstract

This paper describes a flexible software system for the collection of parametric, functional pattern fail, and bitmap data on-line during production testing of VLSI devices. The data is automatically loaded into a relational database for subsequent analysis by process and yield improvement software. The user can control the type and amount of data that is collected at each stage of a product's life. By enabling data collection on every test, the same system can be used for engineering and debug analysis.