Kinetics of high concentration arsenic deactivation at moderate to low temperatures

Abstract

This work investigates the kinetics of arsenic deactivation at temperatures from 500 to 800 degrees C and for concentrations between 1*10/sup 20/ and 1*10/sup 21//cm/sup 3/. Using profiles created by repeated laser melt annealing, we determine mobility as a function of both active and inactive dopant concentration and then characterize the dynamics of carrier deactivation. We observe retrograde resistivity versus concentration at high doses, which is explained by a mobility reduction due to the inactive arsenic and by retrograde electrical activity of the dopant itself.<>