Improved device ruggedness by floating buffer ring

A. Ludikhuize, A. Heringa, R. van Roijen, J. van Zwol
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引用次数: 3

Abstract

An integrated low-substrate-leakage diode structure is considered, operated in reverse breakdown mode, having a parasitic npn transistor. At high current, the Kirk effect, causing shift of the potential by the space charge of moving carriers, leads to high electric fields and causes device degradation. The application of a protective n+ buffer ring around the cathode redistributes field and current and improves the ruggedness. This principle is also successfully applied for improved ESD performance of a lateral DMOST in a Silicon-on-Insulator process.
采用浮动缓冲环,提高了设备的坚固性
考虑了一种集成的低衬底漏二极管结构,工作在反向击穿模式下,具有寄生npn晶体管。在大电流下,柯克效应引起移动载流子的空间电荷引起电位的移动,导致高电场,导致器件退化。阴极周围的保护n+缓冲环的应用重新分配了磁场和电流,提高了耐用性。这一原理也成功地应用于在绝缘体上硅工艺中提高横向DMOST的ESD性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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